1 February 1988 Optical Surface Profile Transducer
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Optical Engineering, 27(2), 272135 (1988). doi:10.1117/12.7976658
Abstract
A noncontacting electro-optical probe is presented that is capable of monitoring the surface height of a sample in ranges of interest for mechanical tooling machines. The surface microtopography is reconstructed after scanning. The working principle is based on monotonic longitudinal chromatic aberration of a lens. Characteristics of a designed lens are reported, along with interferometric testing data on a fabricated prototype. Calibration curves of the complete device are given. After interfacing to a personal computer, automatic probing and scanning are implemented. Results on selected samples are presented.
Franco Quercioli, Bruno Tiribilli, Giuseppe Molesini, "Optical Surface Profile Transducer," Optical Engineering 27(2), 272135 (1 February 1988). http://dx.doi.org/10.1117/12.7976658
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KEYWORDS
Transducers

Lens design

Calibration

Chromatic aberrations

Electro optics

Interferometry

Optical fabrication

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