1 February 1988 Optical Surface Profile Transducer
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Abstract
A noncontacting electro-optical probe is presented that is capable of monitoring the surface height of a sample in ranges of interest for mechanical tooling machines. The surface microtopography is reconstructed after scanning. The working principle is based on monotonic longitudinal chromatic aberration of a lens. Characteristics of a designed lens are reported, along with interferometric testing data on a fabricated prototype. Calibration curves of the complete device are given. After interfacing to a personal computer, automatic probing and scanning are implemented. Results on selected samples are presented.
Franco Quercioli, Franco Quercioli, Bruno Tiribilli, Bruno Tiribilli, Giuseppe Molesini, Giuseppe Molesini, } "Optical Surface Profile Transducer," Optical Engineering 27(2), 272135 (1 February 1988). https://doi.org/10.1117/12.7976658 . Submission:
JOURNAL ARTICLE
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