Development Of A High Resolution Sensor For Surface Roughness

Kimiyuki Mitsui; Makoto Sakai; Yoshitsugu Kizuka

doi:10.1117/12.7976710

1 June 1988 Development Of A High Resolution Sensor For Surface Roughness

Kimiyuki Mitsui; Makoto Sakai; Yoshitsugu Kizuka

Author Affiliations +

Optical Engineering, 27(6), 276498 (1988). https://doi.org/10.1117/12.7976710

Abstract

A high resolution noncontact optical sensor for surface roughness has been developed. The principle of the sensor is based on astigmatic focus error detection, which has been employed in the pickup of optical disk players. First, the measuring principle of the method and the optical system arrangement are described in detail. Then, the results obtained by this method are compared with those obtained by the precise diamond stylus method on several different types of surfaces. The light source of the newly developed apparatus is a diode laser with an output power of 2 mW and a wavelength of 790 nm. The objective lens of the sensor is a standard microscope objective, interchangeable with other objectives. The sensor is small enough for on-machine use and has shown sensitivities on the order of nanometers on diamond-turned metal mirrors. It also permits on-machine measurement of surface profiles in cases in which the object surface is mounted on a machine tool.

Citation Download Citation

Kimiyuki Mitsui, Kimiyuki Mitsui, Makoto Sakai, Makoto Sakai, Yoshitsugu Kizuka, Yoshitsugu Kizuka, } "Development Of A High Resolution Sensor For Surface Roughness," Optical Engineering 27(6), 276498 (1 June 1988). https://doi.org/10.1117/12.7976710 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years