1 June 1988 Fast Optical Detector Deposited On Dielectric Channel Waveguides
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Optical Engineering, 27(6), 276503 (1988). doi:10.1117/12.7976711
Abstract
We have fabricated a thin-film optical detector for detecting short optical pulses propagating in channel waveguides. The detectors show response times of 200 ps full width at half maximum amplitude when illuminated by guided, subpicosecond optical pulses. The detectors are formed by depositing hydrogenated amorphous silicon (a-Si:H) directly on the dielectric channel waveguides. Back-to-back Schottky photodiodes are then formed when interdigitated chrome-gold metal contacts are deposited on the a-Si:H.
Donald R. Larson, Robert J. Phelan, Jr., "Fast Optical Detector Deposited On Dielectric Channel Waveguides," Optical Engineering 27(6), 276503 (1 June 1988). http://dx.doi.org/10.1117/12.7976711
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KEYWORDS
Sensors

Channel projecting optics

Channel waveguides

Dielectrics

Amorphous silicon

Metals

Photodiodes

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