1 July 1988 Development Of A Compact Synchrotron Radiation System For X-Ray Lithography
Author Affiliations +
In the work reported here, we estimate the design parameters of a superconductive synchrotron radiation (SR) ring employing the electron undulating method, which is capable of large-area exposure of SR. The optimum electron energy is found to lie in the range 0.6 to 0.7 GeV with a magnetic field B of 4.0 T to 4.5 T and a beam current in the range 200 to 300 mA. Research into the miniaturization of the SR ring and its injector to complete a practical SR system has continued. In particular, low energy injection improves the cost effectiveness of the SR system, but this requires further study. Therefore, the Electrotechnical Laboratory (ETL) of the Japanese Ministry of International Trade and Industry and Sumitomo Electric Industries, Ltd., jointly completed "NIJI-1," the first compact normal-conductive SR ring in the world designed for low energy injection studies. We succeeded in making the first beam storage in February 1986 and since then have achieved the storage of a beam current of more than 200 mA of 163-MeV electrons; its 1 /e lifetime was about 50 min. Research on topics such as high efficiency injection at low energy and miniaturization of the injector is continuing.
Hiroshi Takada, Kouhei Furukawa, Takio Tomimasu, "Development Of A Compact Synchrotron Radiation System For X-Ray Lithography," Optical Engineering 27(7), 277550 (1 July 1988). https://doi.org/10.1117/12.7976721 . Submission:


Storage Ring Design For X-Ray Lithography
Proceedings of SPIE (March 19 1984)
X ray phase shift mask for proximity x ray lithography...
Proceedings of SPIE (August 25 1999)
Tandem betatron accelerator
Proceedings of SPIE (April 01 1991)
Compact SR Light Source For X-Ray Lithography
Proceedings of SPIE (June 14 1988)
Performances of the CXrL x-ray beamlines (Poster Paper)
Proceedings of SPIE (July 09 1992)

Back to Top