Development Of A Compact Synchrotron Radiation System For X-Ray Lithography

Hiroshi Takada; Kouhei Furukawa; Takio Tomimasu

doi:10.1117/12.7976721

Abstract

In the work reported here, we estimate the design parameters of a superconductive synchrotron radiation (SR) ring employing the electron undulating method, which is capable of large-area exposure of SR. The optimum electron energy is found to lie in the range 0.6 to 0.7 GeV with a magnetic field B of 4.0 T to 4.5 T and a beam current in the range 200 to 300 mA. Research into the miniaturization of the SR ring and its injector to complete a practical SR system has continued. In particular, low energy injection improves the cost effectiveness of the SR system, but this requires further study. Therefore, the Electrotechnical Laboratory (ETL) of the Japanese Ministry of International Trade and Industry and Sumitomo Electric Industries, Ltd., jointly completed "NIJI-1," the first compact normal-conductive SR ring in the world designed for low energy injection studies. We succeeded in making the first beam storage in February 1986 and since then have achieved the storage of a beam current of more than 200 mA of 163-MeV electrons; its 1 /e lifetime was about 50 min. Research on topics such as high efficiency injection at low energy and miniaturization of the injector is continuing.

Citation Download Citation

Hiroshi Takada, Kouhei Furukawa, Takio Tomimasu, "Development Of A Compact Synchrotron Radiation System For X-Ray Lithography," Optical Engineering 27(7), 277550 (1 July 1988). https://doi.org/10.1117/12.7976721

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