Laser Measurement System For Precise And Fast Positioning

Sadao Mori; Toshio Akatsu; Chuuichi Miyazaki

doi:10.1117/12.7976768

1 September 1988 Laser Measurement System For Precise And Fast Positioning

Sadao Mori, Toshio Akatsu, Chuuichi Miyazaki

Author Affiliations +

Optical Engineering, Vol. 27, Issue 9, 279823 (September 1988). https://doi.org/10.1117/12.7976768

Abstract

A laser measurement system for precise and fast positioning of an object has been developed. When the object speed is low, the movement of the object is measured by comparing the phase change of a light beam reflected by the object with the phase modulated by an electro-optic crystal (an active device by which the optical phase can be controlled by the application of a voltage). When the object speed is high, the movement is measured by a fringe counting technique. The system achieves an accuracy of 4 nm and a maximum allowable measurement speed of 1100 mm/s.

Citation Download Citation

Sadao Mori, Toshio Akatsu, and Chuuichi Miyazaki "Laser Measurement System For Precise And Fast Positioning," Optical Engineering 27(9), 279823 (1 September 1988). https://doi.org/10.1117/12.7976768

Published: 1 September 1988

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available