Fabrication process for multilayer x-ray phase gratings

Toby Sean Ross; Raymond T. Perkins; Larry V. Knight

doi:10.1117/12.55658

1 July 1990 Fabrication process for multilayer x-ray phase gratings

Toby Sean Ross, Raymond T. Perkins, Larry V. Knight

Optical Engineering, Vol. 29, Issue 7, (July 1990). https://doi.org/10.1117/12.55658

This paper describes a fabrication method for making multilayer coated phase reflection gratings and arbitrary phase patterned reflection optics suitable for soft x-ray imaging. This represents an improvement over previous fabrication methods using anisotropic or ion-beam etching, which were limited to amplitude structures by the induced roughness on the etched portions of the substrate. Included also is a scalar model for multilayer phase grating reflectivity.

Citation Download Citation

Toby Sean Ross, Raymond T. Perkins, and Larry V. Knight "Fabrication process for multilayer x-ray phase gratings," Optical Engineering 29(7), (1 July 1990). https://doi.org/10.1117/12.55658

Published: 1 July 1990

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available