A 128 X 128 frame-addressed deformable mirror spatial light modulator

R. Mark Boysel

doi:10.1117/12.55946

1 September 1991 A 128 X 128 frame-addressed deformable mirror spatial light modulator

R. Mark Boysel

Author Affiliations +

Optical Engineering, Vol. 30, Issue 9, (September 1991). https://doi.org/10.1117/12.55946

Abstract

We describe the design, fabrication, and performance of the frame-addressed spatial light modulator (FASLM), a frame-updated 128 x 128 deformable mirror device (DMD) spatial light modulator(SLM). This new DMD consists of a 128 x 128 array of mirror elements addressed by an underlying virtual phase CCD array. Each mirror element consists of four cantilever beam mirrors attached to a central pillar, allowing contiguous placement of the elements. The FASLM operates at higher speed (up to 4-kHz frame rate with 100% pixel addressing) and with a higher optical duty cycle (96%) than previous DMD SLMs.

Citation Download Citation

R. Mark Boysel "A 128 X 128 frame-addressed deformable mirror spatial light modulator," Optical Engineering 30(9), (1 September 1991). https://doi.org/10.1117/12.55946

Published: 1 September 1991

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available