1 December 1991 Phase shifting in an oblique incidence interferometer
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Optical Engineering, 30(12), (1991). doi:10.1117/12.56025
Abstract
The evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.
Doris Boebel, Bernd Packross, Hans J. Tiziani, "Phase shifting in an oblique incidence interferometer," Optical Engineering 30(12), (1 December 1991). https://doi.org/10.1117/12.56025
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