1 July 1991 Manufacture of blazed zone plates in germanium for use in the 10 micrometer spectral region
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Abstract
Blazed zone plates have been manufactured in germanium. A suitable surface relief pattern was first generated by recording in photoresist the circular fringes transmitted by a Fabry-Pérot interferometer. By scanning the fringe pattern and recording a series of exposures, we were able to generate a triangular groove profile. This was then transferred to the germanium substrate by ion-beam etching. By this means, diffraction efficiencies in excess of 80% have been achieved at 10μm for zone plates working in transmission and on axis.
Michael C. Hutley, Richard F. Stevens, S. J. Wilson, "Manufacture of blazed zone plates in germanium for use in the 10 micrometer spectral region," Optical Engineering 30(7), (1 July 1991). https://doi.org/10.1117/12.55876 . Submission:
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