1 August 1991 Fabrication of high-resolution multilayer reflection zone plate microlense for the soft x-ray range
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The fabrication of linear, circular, and elliptical reflective zone plate lenses by a multistep process using microfabrication technologies is reported. The diffractive elements were generated by electron-beam lithography on a Mo/C multilayer mirror obtained by means of the triode sputtering technique. The patterns were transferred anisotropically into the multilayer mirror by reactive ion etching in a fluorinated plasma. An intermediate metallic mask made by the lift-off process was used for the transfer process. The groove depth could be monitored by following the reflectivity ofthe structure with a helium-neon laser during etching. Linear, circular (with 0.4-μm outer zones), and elliptical Fresnel zone plates (with 0.8-μ.m outer zones) were produced. Test patterns with a 50-nm top and 90-nm bottom resolution were produced. The groove profile and dimensional control were also investigated.
Chantal G. Khan Malek, Chantal G. Khan Malek, F. R. Ladan, F. R. Ladan, Jean-Rene Rivoira, Jean-Rene Rivoira, } "Fabrication of high-resolution multilayer reflection zone plate microlense for the soft x-ray range," Optical Engineering 30(8), (1 August 1991). https://doi.org/10.1117/12.55909 . Submission:


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