1 September 1991 A 128 X 128 frame-addressed deformable mirror spatial light modulator
Author Affiliations +
Optical Engineering, 30(9), (1991). doi:10.1117/12.55946
Abstract
We describe the design, fabrication, and performance of the frame-addressed spatial light modulator (FASLM), a frame-updated 128 x 128 deformable mirror device (DMD) spatial light modulator(SLM). This new DMD consists of a 128 x 128 array of mirror elements addressed by an underlying virtual phase CCD array. Each mirror element consists of four cantilever beam mirrors attached to a central pillar, allowing contiguous placement of the elements. The FASLM operates at higher speed (up to 4-kHz frame rate with 100% pixel addressing) and with a higher optical duty cycle (96%) than previous DMD SLMs.
R. Mark Boysel, "A 128 X 128 frame-addressed deformable mirror spatial light modulator," Optical Engineering 30(9), (1 September 1991). http://dx.doi.org/10.1117/12.55946
JOURNAL ARTICLE
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KEYWORDS
Mirrors

Charge-coupled devices

Digital micromirror devices

Deformable mirrors

Phase modulation

Electrodes

Analog electronics

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