Production and measurement of superpolished surfaces

Johannes van Wingerden; Hans Jan Frankena; Bertram A. van der Zwan

doi:10.1117/12.56151

1 May 1992 Production and measurement of superpolished surfaces

Johannes van Wingerden, Hans Jan Frankena, Bertram A. van der Zwan

Author Affiliations +

Optical Engineering, Vol. 31, Issue 5, (May 1992). https://doi.org/10.1117/12.56151

Abstract

The influence of polishing time on the roughness of ultrasmooth bowl-feed-polished surfaces is studied. A large improvement of the surface quality is obtained within the first 10 mm, but increasing the polishing time from 10 to 60 mm did not yield a significant difference. A Linnik interference miscroscope, adapted for phase-shifting interferometry, was used for roughness measurements. Preliminary measurements have been performed with a setup determining the scattered intensity within a small solid angle. This relatively simple setup, which is also suitable for uncoated glass surfaces, clearly showed the improvement of surface quality by bowl-feed polishing.

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Johannes van Wingerden, Hans Jan Frankena, and Bertram A. van der Zwan "Production and measurement of superpolished surfaces," Optical Engineering 31(5), (1 May 1992). https://doi.org/10.1117/12.56151

Published: 1 May 1992

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