Optical micromachined pressure sensor for aerospace applications

Diogenes Thomas Angelidis; Philip J. Parsons

doi:10.1117/12.58838

1 August 1992 Optical micromachined pressure sensor for aerospace applications

Diogenes Thomas Angelidis, Philip J. Parsons

Author Affiliations +

Optical Engineering, Vol. 31, Issue 8, (August 1992). https://doi.org/10.1117/12.58838

Abstract

An optical pressure sensor has been designed using silicon micromachining technology. A resonant silicon beam is mounted above a diaphragm and its resonant frequency changes with applied pressure. The sensor is temperature compensated by way of a second pressure-insensitive resonator. Both resonators are optically addressed via the same optical fiber. The sensor is designed to give an overall accuracy of 0.05% full-scale pressure, which is currently between 130 kPa or 3 MPa. Optical technology allows the optical pressure sensor to operate in a harsh aerospace environment where electronic pressure sensors cannot survive.

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Diogenes Thomas Angelidis and Philip J. Parsons "Optical micromachined pressure sensor for aerospace applications," Optical Engineering 31(8), (1 August 1992). https://doi.org/10.1117/12.58838

Published: 1 August 1992

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