1 February 1992 Multifunctional holographic elements for surface measurements
Author Affiliations +
Optical Engineering, 31(2), (1992). doi:10.1117/12.56078
Abstract
A novel single multifunctional holographic optical element is incorporated into a surface measurement system. As a result the system is lightweight, compact, and simpler than conventional ones. Numerical calculation reveals that submicron resolutions are possible both in the horizontal and vertical directions. Finally, experimental results demonstrate the feasibility of the approach.
Erez Hasman, Nir Davidson, Asher A. Friesem, "Multifunctional holographic elements for surface measurements," Optical Engineering 31(2), (1 February 1992). https://doi.org/10.1117/12.56078
JOURNAL ARTICLE
6 PAGES


SHARE
RELATED CONTENT

Imaging method with nanoresolution
Proceedings of SPIE (October 06 2000)
Holographic optical profilometer
Proceedings of SPIE (April 01 1991)
Iterative correction of holographic lenses
Proceedings of SPIE (October 12 1994)

Back to Top