1 February 1992 Multifunctional holographic elements for surface measurements
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Abstract
A novel single multifunctional holographic optical element is incorporated into a surface measurement system. As a result the system is lightweight, compact, and simpler than conventional ones. Numerical calculation reveals that submicron resolutions are possible both in the horizontal and vertical directions. Finally, experimental results demonstrate the feasibility of the approach.
Erez Hasman, Erez Hasman, Nir Davidson, Nir Davidson, Asher A. Friesem, Asher A. Friesem, } "Multifunctional holographic elements for surface measurements," Optical Engineering 31(2), (1 February 1992). https://doi.org/10.1117/12.56078 . Submission:
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