1 August 1992 Optical micromachined pressure sensor for aerospace applications
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Abstract
An optical pressure sensor has been designed using silicon micromachining technology. A resonant silicon beam is mounted above a diaphragm and its resonant frequency changes with applied pressure. The sensor is temperature compensated by way of a second pressure-insensitive resonator. Both resonators are optically addressed via the same optical fiber. The sensor is designed to give an overall accuracy of 0.05% full-scale pressure, which is currently between 130 kPa or 3 MPa. Optical technology allows the optical pressure sensor to operate in a harsh aerospace environment where electronic pressure sensors cannot survive.
Diogenes Thomas Angelidis, Diogenes Thomas Angelidis, Philip J. Parsons, Philip J. Parsons, } "Optical micromachined pressure sensor for aerospace applications," Optical Engineering 31(8), (1 August 1992). https://doi.org/10.1117/12.58838 . Submission:
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