Vibration tolerance in optical imaging

Burn Jeng Lin

doi:10.1117/12.61215

1 March 1993 Vibration tolerance in optical imaging

Burn Jeng Lin

Author Affiliations +

Optical Engineering, Vol. 32, Issue 3, (March 1993). https://doi.org/10.1117/12.61215

Abstract

The effects of object-to-image vibration are studied with the purpose to quantitatively define the maximum acceptable vibration level as a function of resolution, linewidth control, exposure and focus toterances, proximity condition, and illumination coherence. The exposure-defocus trees and windows of optically projected images are used to derive the vibration tolerance as well as the optimum exposure as a function of vibration amplitude. Normalized variables for resolution, focus, and exposure are used so that the results are universally applicable for any given diffraction-limited lens system. Time histograms are used instead of the frequency spectrum to unambiguously define a given vibration environment. The results are plotted in depth of focus as a function of the vibration amplitude. Resolution ranges from 0.48 to 1.2 λ/NA with the aperture ratio σ = 0.4, 0.6, and 0.8. The optimum exposure for maximum depth of focus is similarly plotted.

Citation Download Citation

Burn Jeng Lin "Vibration tolerance in optical imaging," Optical Engineering 32(3), (1 March 1993). https://doi.org/10.1117/12.61215

Published: 1 March 1993

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available