Laser patterning system for integrated optics and storage applications

Mahadev G. Lad; Goureesh M. Naik; Ananth Selvarajan

doi:10.1117/12.61289

1 April 1993 Laser patterning system for integrated optics and storage applications

Mahadev G. Lad, Goureesh M. Naik, Ananth Selvarajan

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Optical Engineering, Vol. 32, Issue 4, (April 1993). https://doi.org/10.1117/12.61289

Abstract

A computer-controlled laser writing system for optical integrated circuits and data storage is described. The system is characterized by holographic (649F) and high-resolution plates. A minimum linewidth of 2.5 μm is obtained by controlling the system parameters. We show that this system can also be used for data storage applications

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Mahadev G. Lad, Goureesh M. Naik, and Ananth Selvarajan "Laser patterning system for integrated optics and storage applications," Optical Engineering 32(4), (1 April 1993). https://doi.org/10.1117/12.61289

Published: 1 April 1993

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