1 November 1993 Light-scattering method for characterizing optical surfaces
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Optical Engineering, 32(11), (1993). doi:10.1117/12.147718
Abstract
A novel method is developed to study the relation between scatterometer scattering and surface scattering, which shows that they can be expressed by an equivalent image formation process with the convolution law. Based on the physical concepts, a scatterometer is constructed and a polished silicon wafer is measured. The power spectrum density function and the autocorrelation function of the surface roughness are calculated from the measured data by the application of the theoretical analysis.
Haiming Wang, "Light-scattering method for characterizing optical surfaces," Optical Engineering 32(11), (1 November 1993). https://doi.org/10.1117/12.147718
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