1 April 1993 Laser patterning system for integrated optics and storage applications
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Abstract
A computer-controlled laser writing system for optical integrated circuits and data storage is described. The system is characterized by holographic (649F) and high-resolution plates. A minimum linewidth of 2.5 μm is obtained by controlling the system parameters. We show that this system can also be used for data storage applications
Mahadev G. Lad, Mahadev G. Lad, Goureesh M. Naik, Goureesh M. Naik, Ananth Selvarajan, Ananth Selvarajan, } "Laser patterning system for integrated optics and storage applications," Optical Engineering 32(4), (1 April 1993). https://doi.org/10.1117/12.61289 . Submission:
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