1 August 1993 New compensating four-phase algorithm for phase-shift interferometry
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Abstract
Phase-shift interferometry suffers from periodic systematic errors caused by erroneous reference phase adjustments and instabilities of the interferometer. A new method is described that uses only four interferograms and eliminates the errors caused by linear adjustment deviations of the reference phase or the mean phase in the interferometer. Test results confirm the theoretical predictions.
Johannes Schwider, Johannes Schwider, Oliver R. Falkenstoerfer, Oliver R. Falkenstoerfer, Horst Schreiber, Horst Schreiber, Andreas Zoeller, Andreas Zoeller, Norbert Streibl, Norbert Streibl, } "New compensating four-phase algorithm for phase-shift interferometry," Optical Engineering 32(8), (1 August 1993). https://doi.org/10.1117/12.143340 . Submission:
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