1 August 1993 Polarizing reflection grating beamsplitter for the 10.6-μm wavelength
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Abstract
A polarizing grating beamsplitter working in reflection at the 10.6-μm wavelength is presented. The grating was designed using rigorous diffraction theory. The incident TM-polarized light is not diffracted but reflected as the zero order, and the TE-polarized light is mainly diffracted into the + 1 and - 1 diffraction orders. The grating is a surface relief with a metal coating. It consists of V-grooves and is fabricated in silicon using photolithography and a combination of dry and wet chemical etching. The measured diffraction efficiencies agree with the theoretical predictions. The sum of the measured diffraction efficiencies of the + 1 and the - 1 orders is 90% for TE polarization and 6% for TM polarization. If the grating is in a conical mount, it can be used as a beam attenuator or a three-way beamsplitter.
Helmut Haidner, Helmut Haidner, Peter Kipfer, Peter Kipfer, John T. Sheridan, John T. Sheridan, Johannes Schwider, Johannes Schwider, Norbert Streibl, Norbert Streibl, Juergen Lindolf, Juergen Lindolf, Martin Collischon, Martin Collischon, Anette Lang, Anette Lang, Joachim Hutfless, Joachim Hutfless, } "Polarizing reflection grating beamsplitter for the 10.6-μm wavelength," Optical Engineering 32(8), (1 August 1993). https://doi.org/10.1117/12.143341 . Submission:
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