PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
A submicrometer-diameter x-ray beam from a tapered glass capillary is used to image micrometer-wide metal stripes on a lithography sample consisting of a 1000-Å-thick gold pattern on a silicon wafer substrate. An image of the gold pattern with submicrometer resolution is easily observed by measuring the transmission of x-rays through the sample as it is scanned in two dimensions. The size of the x-ray beam leaving the tip of the capillary was determined to be 0.10±0.01 μm by fitting a function to data obtained from transmission and fluorescence measurements as the edge of a gold stripe was scanned across the end of the capillary. Using the same capillary, Laue diffraction was observed from a 500-μm-thick silicon wafer in a 10-s exposure corresponding to an illuminated volume of 3.9 μm3. The x-ray intensity (flux/area) of the beam leaving the pipette was shown to be 960 times higher than the intensity entering the pipette, at 6 keV. As the ability to fabricate tapered capillaries improves, many new experiments with submicrometer x-ray beams including Laue diffraction from significantly smaller volumes should be possible.
Stephen Hoffmann,Daniel J. Thiel, andDonald H. Bilderback
"Applications of single tapered glass capillaries: submicrometer x-ray imaging and Laue diffraction," Optical Engineering 33(1), (1 January 1994). https://doi.org/10.1117/12.149148
Published: 1 January 1994
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Stephen Hoffmann, Daniel J. Thiel, Donald H. Bilderback, "Applications of single tapered glass capillaries: submicrometer x-ray imaging and Laue diffraction," Opt. Eng. 33(1) (1 January 1994) https://doi.org/10.1117/12.149148