1 January 1994 High-performance 5-μm 640 x 480 HgCdTe-on-sapphire focal plane arrays
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Abstract
A high-performance 5-μm 640 X 480 HgCdTe/CdTe/Al2O3 infrared focal plane array (FPA) that offers full TV-compatible resolution with excellent sensitivity at temperatures below 120 K has been developed. Mean FPA D* at 95 K and background of 1014 photons/cm2 s is background-limited at ~1 x 1012 cm Hz1/2/W for the typical mean quantum efficiency of 60 to 70%. The key technology making this large, high-sensitivity device producible is the epitaxial growth of HgCdTe on a rugged CdTe-buffered sapphire substrate. Mean camera noise-equivalent temperature difference NEΔT of 13 mK has been achieved at ≤ 120 K operating temperature and 3.4- to 4.2-μm passband; this is about an order of magnitude better than similar currently available cameras, which use PtSi FPAs and require cooling to ≤ 77 K to maintain performance at low scene temperatures.
Lester J. Kozlowski, Lester J. Kozlowski, Robert B. Bailey, Robert B. Bailey, Scott A. Cabelli, Scott A. Cabelli, Donald E. Cooper, Donald E. Cooper, Isoris S. Gergis, Isoris S. Gergis, Annie Chi-yi Chen, Annie Chi-yi Chen, William V. McLevige, William V. McLevige, Gary L. Bostrup, Gary L. Bostrup, Kadri Vural, Kadri Vural, William E. Tennant, William E. Tennant, Philip E. Howard, Philip E. Howard, } "High-performance 5-μm 640 x 480 HgCdTe-on-sapphire focal plane arrays," Optical Engineering 33(1), (1 January 1994). https://doi.org/10.1117/12.151551 . Submission:
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