1 November 1994 Dry etching for coherent refractive microlens arrays
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Optical Engineering, 33(11), (1994). doi:10.1117/12.179880
Abstract
Coherent arrays of refractive micro-optics are fabricated in the surface of silicon using a combination of lithographic and reactive-ion etching (RIE) techniques. The aspheric profile can be approximated in a stepwise manner by iterative steps of photolithography and RIE (binary optics technology), by direct etching of a preshaped polymer microlens etch mask into the substrate, or by analog etching of a lens profile directly into the substrate through a pinhole mask.
Margaret B. Stern, Theresa Rubico Jay, "Dry etching for coherent refractive microlens arrays," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.179880
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