1 November 1994 Microfabricated optical chopper
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Abstract
A micromachined chopper has demonstrated modulation of coherent and incoherent light. The chopper uses an electrostatically driven lateral micromotor to actuate a shutter plate across a through-substrate window. Test devices have been fabricated and exhibit operating frequencies ranging from 1 to 31 kHz and have stable deflection amplitudes of 400 μm. Further optimizations of the design are discussed.
Michael T. Ching, Michael T. Ching, Reid A. Brennen, Reid A. Brennen, Richard M. White, Richard M. White, } "Microfabricated optical chopper," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.181576 . Submission:
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