1 November 1994 Preshaping photoresist for refractive microlens fabrication
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Optical Engineering, 33(11), (1994). doi:10.1117/12.179887
Abstract
Refractive microlenses are fabricated by the preshaped photoresist refractive optics by melting (P2ROM) process. A polar coordinate HeCd laser beam lithography system (laser writer) is used to directly expose a continuous spheroidal profile into photoresist to fabricate 200-μm-diam microlenses with speeds between f/1.5 and f/5. Interferometric surlace measurements, used to determine the optical quality of the preshaped microlenses, indicate reduced spherical aberration in slow lenses fabricated by the P2ROM method.
Theresa Rubico Jay, Margaret B. Stern, "Preshaping photoresist for refractive microlens fabrication," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.179887
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