1 June 1994 Interferometric determination of thickness of free-standing submicron Formvar films
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Abstract
A method for measuring the thickness of free-standing films of Formvar in the range of 2000 Å to 5 μm is presented. The optical path difference of the film with reference to air is measured using a modified Jamin interferometer, and the refractive index is determined by a thin wedge technique. The method provides thickness measurements with an accuracy of ±300 Å. The results are found to be in good agreement with those obtained from a profilometer. This simple method can be very useful for thickness measurement of free-standing thin plastic films for extreme ultraviolet (XUV) soft x-ray research applications.
R. P. Shukla, Avijit Chowdhury, Parshotam Dass Gupta, "Interferometric determination of thickness of free-standing submicron Formvar films," Optical Engineering 33(6), (1 June 1994). https://doi.org/10.1117/12.167177
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