Current high-technology precision engineering sensors with submicrometer and even nanometer resolutions have become a necessity. Among the various types of noncontact high-resolution sensors, noninterferometric electro-optical (EO) sensors have their built-in preferential features. Earlier, we developed a triangulation principle based noncontact EO sensor with 0.01-μm resolution. By optimizing the design parameters of this EO sensor, the resolution has been enhanced by almost an order of magnitude. A piezoelectric transducer (PZT) mirror with 3 μm/kV excitation voltage has been used as the target surface. The details of experimental setup and the results arrived at are presented.
Lakhan Singh Tanwar,
Baij Nath Gupta,
S. C. Bansal,
"Sensitivity enhancement of an electro-optic sensor for displacement measurement," Optical Engineering 33(6), (1 June 1994). https://doi.org/10.1117/12.168252