1 July 1994 Laser beam direct writing of fine lines of α-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process
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Optical Engineering, 33(7), (1994). doi:10.1117/12.169721
Abstract
Fine lines of α-Fe2O3 have been formed on quartz substrates by laser beam direct writing on metalorganic spin-coated films. A modulated krypton ion writing laser beam and a He-Ne probing laser beam were colinearly focused onto the films with a spot size about 10 to 50 m in diameter. A series of characterizations have been conducted on the written lines by employing different techniques ranging from thermogravimetric analysis (TGA), Fourier transform infrared (FTIR) spectroscopy, scanning electron spectroscopy (SEM), and x-ray diffraction (XRD) to transmission electron microscopy (TEM). In this way, a better understanding has been achieved regarding the metalorganic decomposition mechanism, structure, and morphology of the laser written lines. From the time-resolved transmittance change induced by the krypton ion laser pulse irradiation, transient behavior of laser decomposition process of metalorganic materials has also been studied.
Songsheng Xue, Wahib Ousi-Benomar, Roger A. Lessard, "Laser beam direct writing of fine lines of α-Fe2O3 from metalorganic spin-coated films and transient behavior study of laser decomposition process," Optical Engineering 33(7), (1 July 1994). http://dx.doi.org/10.1117/12.169721
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KEYWORDS
Laser processing

Molybdenum

Transmission electron microscopy

Crystals

Scanning electron microscopy

FT-IR spectroscopy

Optical lithography

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