1 August 1994 Characterization of microlenses using a phase-shifting shearing interferometer
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Optical Engineering, 33(8), (1994). doi:10.1117/12.173567
Abstract
A shearing interferometer is proposed for the characterization of microlenses. The optical configuration of the test system enables the measurement of the wave aberrations, the focal length, and the deviations of the lens surface from an ideal sphere. In addition, a quantitative evaluation method is given that enables the calculation of the wave aberrations (e.g., the phase function) from the shearing interferometer data.
Horst Sickinger, Oliver R. Falkenstoerfer, Norbert Lindlein, Johannes Schwider, "Characterization of microlenses using a phase-shifting shearing interferometer," Optical Engineering 33(8), (1 August 1994). http://dx.doi.org/10.1117/12.173567
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KEYWORDS
Wavefronts

Shearing interferometers

Mirrors

Microlens

Interferometry

Phase shifts

Phase measurement

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