1 August 1994 Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer
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Abstract
A real-time 2-D surface profile measurement system is described. In this system, a laser diode and a 2-D charge-coupled device image sensor are used as a light source and a photodetector, respectively. The phase is detected from the sinusoidal phase-modulating interference signal using the high-speed electrical circuit. The time required for phase detection is 20 ms for 50 x 40 measuring points. Because the phases can be obtained for even and odd fields of the image sensor, the original spatial resolution of the image sensor is not reduced in this system. Repeatability of the measurement is ~14 nm, rms.
Takamasa Suzuki, Takamasa Suzuki, Osami Sasaki, Osami Sasaki, Jinsaku Kaneda, Jinsaku Kaneda, Takeo Maruyama, Takeo Maruyama, } "Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer," Optical Engineering 33(8), (1 August 1994). https://doi.org/10.1117/12.173561 . Submission:
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