1 August 1994 Response analysis in the 300- to 2500-Å spectral range of ultraviolet-enhanced charge-coupled devices
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Optical Engineering, 33(8), (1994). doi:10.1117/12.173588
Abstract
The measurements of the ultraviolet response by some UV-enhanced CCDs have been realized. In particular, the quantum efficiency of coronene- and lumigen-coated and of back-illuminated ion-implanted CCDs have been measured in the 300 to 2500-Å spectral range. Very interesting performances have been found, mainly for one ion-implanted CCD with quantum efficiency values of more than 60% at 304 Å. Also some measurements of the CCD uniformity response and spatial resolution capability in this spectral region have been performed. The obtained results are very promising for the possibility of using these semiconductor detectors in the ultraviolet spectral region also with very good performance.
Giampiero Naletto, Giuseppe Tondello, Giovanni Bonanno, Rosario Di Benedetto, Salvatore Scuderi, "Response analysis in the 300- to 2500-Å spectral range of ultraviolet-enhanced charge-coupled devices," Optical Engineering 33(8), (1 August 1994). http://dx.doi.org/10.1117/12.173588
JOURNAL ARTICLE
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KEYWORDS
Charge-coupled devices

Quantum efficiency

Ultraviolet radiation

Sensors

Photodiodes

Calibration

Silicon

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