Beamsplitter path equalization for white-light interferometry

Marek Dobosz; Hirokazu Matsumoto; Shige Iwasaki

doi:10.1117/12.188618

1 February 1995 Beamsplitter path equalization for white-light interferometry

Marek Dobosz, Hirokazu Matsumoto, Shige Iwasaki

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Optical Engineering, Vol. 34, Issue 2, (February 1995). https://doi.org/10.1117/12.188618

Abstract

In a two-beam, white-light, or polychromatic-Iight interferometer, any path-length difference in the beamsplitter introduces wavelength- dependent path delay because of the glass dispersion. A technique to align balanced path is described. The method is based on two- or three-wavelength simultaneous interferometry. Difference in intensity of fringes placed symmetrically around the zero interference order (ZIO) is used to measure and equalize the beamsplitter path (BP). As a polychromatic source of light. 660-, 840-, and 780-nm wavelength mixed beams of multimode laser diodes are applied. The technique allows us to balance the path difference with an accuracy better than ± 0.2 μm. Theoretical background and experimental verification of the method is presented.

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Marek Dobosz, Hirokazu Matsumoto, and Shige Iwasaki "Beamsplitter path equalization for white-light interferometry," Optical Engineering 34(2), (1 February 1995). https://doi.org/10.1117/12.188618

Published: 1 February 1995

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