Soft x-ray phase modulation multilayer dispersive element

Lixiang Yuan; Zhengxiu Fan; Mingqi Cui; Shaojun Fu

doi:10.1117/12.201632

1 May 1995 Soft x-ray phase modulation multilayer dispersive element

Lixiang Yuan, Zhengxiu Fan, Mingqi Cui, Shaojun Fu

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Optical Engineering, Vol. 34, Issue 5, (May 1995). https://doi.org/10.1117/12.201632

Abstract

Multilayer phase gratings have higher diffraction efficiency than amplitude gratings in the soft x-ray region. The authors give a detailed description of the fabrication, characterization, and performance of soft x-ray phase modulation multilayer laminar gratings. The experimental results are discussed and compared with theory.

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Lixiang Yuan, Zhengxiu Fan, Mingqi Cui, and Shaojun Fu "Soft x-ray phase modulation multilayer dispersive element," Optical Engineering 34(5), (1 May 1995). https://doi.org/10.1117/12.201632

Published: 1 May 1995

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