Optical analysis by means of spectroscopic reflectometry of single and  double layers with correlated randomly rough boundaries

Ivan Ohlidal; Frantisek Vizd'a; Miloslav Ohlidal

doi:10.1117/12.203111

1 June 1995 Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries

Ivan Ohlidal, Frantisek Vizd'a, Miloslav Ohlidal

Author Affiliations +

Optical Engineering, Vol. 34, Issue 6, (June 1995). https://doi.org/10.1117/12.203111

Abstract

Optical analysis of rough single and double layers is performed by interpreting the spectral dependences of the measured coherent reflectance. Formulas for the coherent reflectance of these systems derived within the scalar theory of diffraction of light are used for this interpretation. Possibilities and limitations of the method utilized are illustrated using several concrete samples of both the rough single and double layers represented by models corresponding to fully correlated (identical), partially correlated, and fully uncorrelated boundaries. It is shown that the values of the optical parameters, the root-mean-square (rms) values of the heights of the boundary irregularities and the values of the cross-correlation coefficients of the boundaries characterizing the layered systems mentioned can be determined within the method described.

Citation Download Citation

Ivan Ohlidal, Frantisek Vizd'a, and Miloslav Ohlidal "Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries," Optical Engineering 34(6), (1 June 1995). https://doi.org/10.1117/12.203111

Published: 1 June 1995

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available