Exact measurement of flat surface profiles by object shifts in a       phase-conjugate Fizeau interferometer

Osami Sasaki; Yuuichi Takebayashi; Xiangzhao Wang; Takamasa Suzuki

doi:10.1117/12.210750

1 October 1995 Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer

Osami Sasaki, Yuuichi Takebayashi, Xiangzhao Wang, Takamasa Suzuki

Author Affiliations +

Optical Engineering, Vol. 34, Issue 10, (October 1995). https://doi.org/10.1117/12.210750

Abstract

We propose a method of exact measurement of flat surface profiles in a phase-conjugate Fizeau interferometer. Aberration of lenses causes an undesirable phase distribution in the interference signal of the phase-conjugate Fizeau interferometer. To eliminate this phase distribution, we shift the object in two directions orthogonal to each other and we get difference values of the surface profile of the object. Additional displacements of the object surface involved in the shifts lead to some small errors in the difference values. We estimate an exact surface profile by solving the difference equations. Characteristics of the method are made clear through computer simulations and measurements of a 40-mm-diam flat mirror.

Citation Download Citation

Osami Sasaki, Yuuichi Takebayashi, Xiangzhao Wang, and Takamasa Suzuki "Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer," Optical Engineering 34(10), (1 October 1995). https://doi.org/10.1117/12.210750

Published: 1 October 1995

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