1 October 1995 Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer
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Abstract
We propose a method of exact measurement of flat surface profiles in a phase-conjugate Fizeau interferometer. Aberration of lenses causes an undesirable phase distribution in the interference signal of the phase-conjugate Fizeau interferometer. To eliminate this phase distribution, we shift the object in two directions orthogonal to each other and we get difference values of the surface profile of the object. Additional displacements of the object surface involved in the shifts lead to some small errors in the difference values. We estimate an exact surface profile by solving the difference equations. Characteristics of the method are made clear through computer simulations and measurements of a 40-mm-diam flat mirror.
Osami Sasaki, Osami Sasaki, Yuuichi Takebayashi, Yuuichi Takebayashi, Xiangzhao Wang, Xiangzhao Wang, Takamasa Suzuki, Takamasa Suzuki, } "Exact measurement of flat surface profiles by object shifts in a phase-conjugate Fizeau interferometer," Optical Engineering 34(10), (1 October 1995). https://doi.org/10.1117/12.210750 . Submission:
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