1 December 1995 Continuous-relief fan-out elements with optimized fabrication tolerances
Author Affiliations +
Abstract
The design of kinoform fan-out elements with high efficiency and reduced sensitivity to vertical profile scaling errors is presented. We start from a high-efficiency continuous-phase fan-out solution and optimize the position of the 0-2π transitions in the phase function, in order to achieve a high fabrication-error tolerance. The sensitivity of Fourier-transform and focusing fan-out elements to vertical etch-depth errors is analyzed. The limitations for the fabrication of such structures by laserbeam writing are discussed. In particular, the influence of the finite writing-spot diameter on the fan-out performance is investigated. Design rules for fan-out elements, which consider fabrication constraints, are derived. Experimental results are presented for cylindrical focusing fanout elements with small uniformity error (2%) and weak profile scaling dependence.
Peter Ehbets, Peter Ehbets, Markus Rossi, Markus Rossi, Hans Peter Herzig, Hans Peter Herzig, } "Continuous-relief fan-out elements with optimized fabrication tolerances," Optical Engineering 34(12), (1 December 1995). https://doi.org/10.1117/12.215507 . Submission:
JOURNAL ARTICLE
9 PAGES


SHARE
RELATED CONTENT

Optical properties of the phase sampling filter
Proceedings of SPIE (November 20 2003)
Diffraction Analysis For Multiple-Beam Pellet Irradiance
Proceedings of SPIE (August 09 1977)
Systems engineering analysis of image quality
Proceedings of SPIE (October 23 2000)
Apodizers with random transmittance
Proceedings of SPIE (July 05 1999)

Back to Top