1 February 1995 Simple technique for out-of-focus feature alignment
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Abstract
A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 μm or better.
Jose M. Sasian, Douglas A. Baillie, "Simple technique for out-of-focus feature alignment," Optical Engineering 34(2), (1 February 1995). https://doi.org/10.1117/12.194047
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