1 February 1995 Simple technique for out-of-focus feature alignment
Author Affiliations +
Abstract
A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 μm or better.
Jose M. Sasian, Jose M. Sasian, Douglas A. Baillie, Douglas A. Baillie, } "Simple technique for out-of-focus feature alignment," Optical Engineering 34(2), (1 February 1995). https://doi.org/10.1117/12.194047 . Submission:
JOURNAL ARTICLE
3 PAGES


SHARE
Back to Top