1 April 1995 Polarizational reflectometers for realization of the method of combined ellipsometric parameters
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Abstract
The construction of two novel double-beam polarizational devices for the realization of the combined ellipsometric parameter method for solids and for liquids is described. As an example, the results of measurements based on this method for nonoxidic and oxidic surfaces of copper are presented.
Petro I. Drozd, Petro I. Drozd, Leonid V. Poperenko, Leonid V. Poperenko, Vasiliy V. Prorok, Vasiliy V. Prorok, Igor A. Shaykevich, Igor A. Shaykevich, } "Polarizational reflectometers for realization of the method of combined ellipsometric parameters," Optical Engineering 34(4), (1 April 1995). https://doi.org/10.1117/12.197147 . Submission:
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