1 May 1995 Soft x-ray phase modulation multilayer dispersive element
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Optical Engineering, 34(5), (1995). doi:10.1117/12.201632
Abstract
Multilayer phase gratings have higher diffraction efficiency than amplitude gratings in the soft x-ray region. The authors give a detailed description of the fabrication, characterization, and performance of soft x-ray phase modulation multilayer laminar gratings. The experimental results are discussed and compared with theory.
Lixiang Yuan, Zhengxiu Fan, Mingqi Cui, Shaojun Fu, "Soft x-ray phase modulation multilayer dispersive element," Optical Engineering 34(5), (1 May 1995). http://dx.doi.org/10.1117/12.201632
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KEYWORDS
Multilayers

X-rays

Etching

Ions

Diffraction gratings

Phase modulation

Scanning electron microscopy

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