1 May 1995 Soft x-ray phase modulation multilayer dispersive element
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Abstract
Multilayer phase gratings have higher diffraction efficiency than amplitude gratings in the soft x-ray region. The authors give a detailed description of the fabrication, characterization, and performance of soft x-ray phase modulation multilayer laminar gratings. The experimental results are discussed and compared with theory.
Lixiang Yuan, Lixiang Yuan, Zhengxiu Fan, Zhengxiu Fan, Mingqi Cui, Mingqi Cui, Shaojun Fu, Shaojun Fu, } "Soft x-ray phase modulation multilayer dispersive element," Optical Engineering 34(5), (1 May 1995). https://doi.org/10.1117/12.201632 . Submission:
JOURNAL ARTICLE
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