Andreas Braunschweiler AGIE SA (Switzerland) Pere Llosas Swiss Federal Institute of Technology (Switzerland) Axel Bertholds AGIE (Switzerland) Charles Baur Swiss Federal Institute of Technology (Switzerland)
A miniature optical position sensor has been designed, developed, and constructed. It provides fast and contactless measurement of the lateral position of a 0.5-mm-diam cylindrical pin in two directions with an accuracy of ± 3 μm over a range of 1.4 x 1.4 mm2. The sensor consists of an optomechanical measuring head, an optoelectronics circuit, and an interconnection cable including six optical fibers. It has been implemented on a robot arm and applied with success in an automatic microassembly operation.