1 September 1995 Optical sensing of surface roughness and waviness by a computer-generated hologram
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Abstract
An optical surface roughness and waviness sensor for sufficiently smooth surfaces is introduced. The sensor is based on a computer-generated hologram , which focuses the specular reflectance to desired spots on the focal plane. Computer simulations were made to analyze the system and to compute the calibration curve. Contrast analysis was performed to estimate the average roughness of Gaussian surfaces. Results are compared with data measured form surface roughness standards.
Jari T. Rasanen, Markku Savolainen, Raimo Veil Johannes Silvennoinen, Kai-Erik Peiponen, "Optical sensing of surface roughness and waviness by a computer-generated hologram," Optical Engineering 34(9), (1 September 1995). https://doi.org/10.1117/12.208093 . Submission:
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