Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler

Haizhang Li; Xiaodan Li; Manfred W. Grindel; Peter Z. Takacs

doi:10.1117/1.600900

1 February 1996 Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler

Haizhang Li, Xiaodan Li, Manfred W. Grindel, Peter Z. Takacs

Optical Engineering, Vol. 35, Issue 2, (February 1996). https://doi.org/10.1117/1.600900

A prototype of a vertical scanning long trace profiler was used to measure the surface of a polished x-ray telescope mandrel in a vertical configuration and provides a 3-D view of the surface figure and slope errors. The design of the prototype system is described and experimental results are presented. Results indicate that the prototype instrument is capable of an absolute height measurement accuracy of about 50 nm with a repeatability of better than 20 nm, and a slope measurement accuracy of about 1 microradian.

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Haizhang Li, Xiaodan Li, Manfred W. Grindel, and Peter Z. Takacs "Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler," Optical Engineering 35(2), (1 February 1996). https://doi.org/10.1117/1.600900

Published: 1 February 1996

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