Automatic measurement of surface height with the interferoscope

Torgny E. Carlsson; Nils H. Abramson; Kai H. Fischer

doi:10.1117/1.600977

1 October 1996 Automatic measurement of surface height with the interferoscope

Torgny E. Carlsson, Nils H. Abramson, Kai H. Fischer

Optical Engineering, Vol. 35, Issue 10, (October 1996). https://doi.org/10.1117/1.600977

Using a grazing incidence interferometer, the interferoscope, an automatic absolute measurement of a test object surface height can be made by counting the number of interference fringes when varying the surface incident angle. This is accomplished by combining the interferoscope with a computer-controlled stepping motor along with an image processing system. By transforming the equations describing the interferoscope, the sought depth can be regarded as a ‘‘frequency,’’ which can be attained using Fourier transforms or other frequency evaluation algorithms.

Citation Download Citation

Torgny E. Carlsson, Nils H. Abramson, and Kai H. Fischer "Automatic measurement of surface height with the interferoscope," Optical Engineering 35(10), (1 October 1996). https://doi.org/10.1117/1.600977

Published: 1 October 1996

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available