1 October 1996 Automatic measurement of surface height with the interferoscope
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Abstract
Using a grazing incidence interferometer, the interferoscope, an automatic absolute measurement of a test object surface height can be made by counting the number of interference fringes when varying the surface incident angle. This is accomplished by combining the interferoscope with a computer-controlled stepping motor along with an image processing system. By transforming the equations describing the interferoscope, the sought depth can be regarded as a ‘‘frequency,’’ which can be attained using Fourier transforms or other frequency evaluation algorithms.
Torgny E. Carlsson, Nils H. Abramson, Kai H. Fischer, "Automatic measurement of surface height with the interferoscope," Optical Engineering 35(10), (1 October 1996). https://doi.org/10.1117/1.600977 . Submission:
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