1 October 1996 Automatic measurement of surface height with the interferoscope
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Abstract
Using a grazing incidence interferometer, the interferoscope, an automatic absolute measurement of a test object surface height can be made by counting the number of interference fringes when varying the surface incident angle. This is accomplished by combining the interferoscope with a computer-controlled stepping motor along with an image processing system. By transforming the equations describing the interferoscope, the sought depth can be regarded as a ‘‘frequency,’’ which can be attained using Fourier transforms or other frequency evaluation algorithms.
Torgny E. Carlsson, Torgny E. Carlsson, Nils H. Abramson, Nils H. Abramson, Kai H. Fischer, Kai H. Fischer, } "Automatic measurement of surface height with the interferoscope," Optical Engineering 35(10), (1 October 1996). https://doi.org/10.1117/1.600977 . Submission:
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