1 October 1996 Microscopic interferometer for surface roughness measurement
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Abstract
We describe a phase-shifting microscopic Mirau interferometer for measurement of surface roughness in which feedback control is implemented for shifter asymptotic adjustment. The actual height resolution of our instrument is of ~0.3 nm with a measurement accuracy of 0.5 nm. Comments on interferometer design, experimental examples, and error analysis are also given.
Zhihua Ding, Guiying Wang, ZhiJiang Wang, "Microscopic interferometer for surface roughness measurement," Optical Engineering 35(10), (1 October 1996). https://doi.org/10.1117/1.600979
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