1 November 1996 Optical flat surfaces: direct interferometric measurements of small-scale irregularities
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Abstract
Some applications of optical surfaces place very stringent limits on small-scale surface irregularities, such as ripples. A method that can be used to make direct interferometric measurements of such smallscale irregularities is described.
Parameswaran Hariharan, Parameswaran Hariharan, } "Optical flat surfaces: direct interferometric measurements of small-scale irregularities," Optical Engineering 35(11), (1 November 1996). https://doi.org/10.1117/1.601065 . Submission:
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